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분야
pptx2.Experimental
3.Result and discussions
4.Conclusion
5. Q & A
Although both surfaces of sample is almost smooth, You can see the more oxygen concentration is contained, the bigger grain sizes of surface is observed.
O2 content of working gas increased,
created bigger grains
transmittance increased
band gap energy increased
refractive index decreased
had more semiconductor behavior
We can conclude ZnO thin films produced by RF sputtering will have new advantage for industrial applications
It can be considered that physical properties such as optical, electrical and morphological of ZnO thin film produced by RF sputtering strongly depend on O2 concentration during production
Thus, it can be possible to be adjusted for various industrial applications like window materials, optoelectronic devices, hard coating, etc.
