소개글
[화학공학]ZnO박막과 ZnO에 Al 농도를 달리한 박막의 PL측정과 분석(영문)에 대한 자료입니다.
목차
1.Definition
2.Experiment
3.Results
4.Conclusions
본문내용
ZnO?
n-type semi conductor
hexagonal wurtzite structure
good transparency
high electron mobility
wide band gap
Nanowire?
A nanowire is a nanostructure, with the diameter of the order of a nanometer (10−9 meters).
• Sputtering?
Sputtering is a process whereby atoms are ejected from a solid target material due to bombardment of the target by energetic particles.
Advantage
Sputtering of insulating film
Homogeneities of film thickness
useable for large target
Advantage
Sputtering of insulating film
Homogeneities of film thickness
useable for large target