부제 : ABSTRACT 1. INTRODUCTION 2. MATHEMATICAL MODEL OF THE SEMI-ACTIVE RFC MECHANISM 3. SIMULATION RESULTS AND DISCUSSIONS CONCLUSIONS REFERENCES
Rapid acceleration or deceleration of a mover transfers large reaction force to system base so that the system base vibrates in very large magnitude. This residual vibration of the system base is one of major reasons to reduce lifespan as well as quality of manufacturing equipment. Vibration of the system base of a linear motor motion stage has been decreased with a passive or active RFC mechanism with a movable magnet track. The cost-effective passive RFC mechanism cannot deal with variation of the motion profile although the high-end active RFC mechanism can be used for any motion profiles. In this paper, we propose semi-active RFC mechanism for a linear motor motion stage. The semi-active RFC mechanism adjusts damping of fixed coil without any external energy. Effectiveness of the semi-active RFC mechanism is confirmed with simulations.