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분야
pptMaking the Wafer
The Mask Making Process
Epitaxy
Photolithography process
Oxidation & Exposure
Etch & strip
Diffusion & Implant
Deposition
Oxidation
Interconnect - Vias
Interconnect – Metallization
Chemical Mechanical Planarization
Interconnect – Layers
Inspection & Measurement
Yield Impact
Test, Assembly & Packaging
Wafer Probe
Memory repair
Assembly & Packiging
Package Test
The process
-A seed crystal is suspended in a molten bath of silicon
-It is slowly pulled up and grows into an ingot of silicon
-The ingot is removed and ground down to diameter
-The end is cut off, then thin silicon wafers are sawn off (sliced) and polished
Epitaxy
The growth of an ultra-pure layer of crystalline silicon
Approx 3% of wafer thickness
Contaminant-free for the subsequent construction of transistor
주로 외국 사이트에서 발췌 하였으며, 매우 자세하게 정리하였습니다.
발표 수업 중에 최고 점수를 받은 자료 입니다.
