I. Introduction
1. Supply of Schooling
People in the supply side emphasize the school enrollment. One of the most prominent policies to get the children into a classroom is UN’s Millennium Development Goals (MDGs) by Jeffrey Sachs. It ensures that, by 2015, children everywhere, boys and girls alike, will be able to complete a full course of primary schooling and eliminate gender disparity in
Lithography
Si Wafer coated with PR
Spin coating
PR is coated evenly by turning round rapidly.
Exposure
Align the Mask exactly and emit UV.(fixed 10sec)
Observation
See the completed sample through SEM
Development
∙ Dip the sample in the alkaline solution.
→(process parameter : 10sec 60sec 180sec)
∙ Due to differences in solubility of the exposed portion to be dissolv