● Definition of plasma
Plasma is one of the four fundamental states of matter, along with solid, liquid, and gas. It is an ionized gas consisting of a collection of charged particles, including ions, electrons, and neutral atoms or molecules. Plasma can be found naturally in the universe in the form of stars, lightning, and auroras, but it can also be artificially created and controlled for
Introduction (What is plasma?)
1. Definition of plasma
Plasma is one of the four fundamental states of matter, along with solid, liquid, and gas. It is an ionized gas consisting of a collection of charged particles, including ions, electrons, and neutral atoms or molecules. Plasma can be found naturally in the universe in the form of stars, lightning, and auroras, but it can also be artif
Lithography
Si Wafer coated with PR
Spin coating
PR is coated evenly by turning round rapidly.
Exposure
Align the Mask exactly and emit UV.(fixed 10sec)
Observation
See the completed sample through SEM
Development
∙ Dip the sample in the alkaline solution.
→(process parameter : 10sec 60sec 180sec)
∙ Due to differences in solubility of the exposed portion to be dissolv
02 How a nuclear power plant works
The principle of making electricity is same, but
the sole difference between them is the material for creating steam.