Tungsten filament was
heated to generate electron.
Revolving 270, the electrons
are directed by
electromagnetic field
resulting collision onto the
source surface
After heated to certain
degree, source gas was
generated
The sensor monitors the
thickness of deposited film.
High vacuum should be kept in
the chamber not to contain
oxigen
gas which damages
substrat
♯형광체(phosphor)
(1)형광체의 정의
전자 빔의 충격에 의해 발광하는 아주 작은 결정 입자의 집합체. 텔레비전 수상관에는 일반적으로 황화물(黃化物) 형광체(ZS 또는 ZS와 CdS의 혼합 결정에 소량의 Ag를 첨가한 것)가 많이 사용되고 컬러 수상관의 적색 발광용으로는 희토류(稀土類) 형광체(Y2O2 또는 Y2
♯형광체(phosphor)
(1)형광체의 정의
전자 빔의 충격에 의해 발광하는 아주 작은 결정 입자의 집합체. 텔레비전 수상관에는 일반적으로 황화물(黃化物) 형광체(ZS 또는 ZS와 CdS의 혼합 결정에 소량의 Ag를 첨가한 것)가 많이 사용되고 컬러 수상관의 적색 발광용으로는 희토류(稀土類) 형광체(Y2O2 또
of petroleum products, oil refining business has increased its Crude Refining Facility is composed of the atmospheric crude distillation unit fractionating crude oil into various products, the vacuum distillation unit separating Vacuum Gas Oil and Vacuum Residue from Atmospheric residue, LPG recovery unit, the hydro treating unit removing sulfur from intermediate products of Gas Oil and Kerosene,
of no use of oil
Application.
High vacuum pump is used for many parts like process of semiconductor, IC, nuclear fusion reactor and etcetera. Recently, high vacuum is especially used in aerospace industry and process of solar cell.[1]
Ultra High Vacuum
Definition.
Ultra high vacuum region is defined as the pressure lower than 10 to the minus 8.
Generally, there are three steps to mak