Plasma Doping; Counter-doping, Shallow Junction 형성 등을 위한 이온 주입
⇒ 반도체 제조 공정의 50% 이상이 플라즈마를 활용한 공정임.
Electrostatic E-Field
Coupling of ion energy & ion flux
high pressure operation
low ion density (~1E9/cm3)
Inductive E-Field
Decoupling of ion energy & ion flux
High density ion flux (~1E11/cm3)
low pressure opera
Coffee
Coffee is reported to be among the most widely consumed beverages in the world.
For many people, coffee is a breakfast staple, providing a boost of energy to start the day.
Coffee is a complex chemical mixture reported to contain more than a thousand different chemicals.
Compounds in coffee may affect human health.
1. High blood pressure
Caffeine can cause a dramati
● Definition of plasmaPlasma is one of the four fundamental states of matter, along with solid, liquid, and gas. It is an ionized gas consisting of a collection of charged particles, including ions, electrons, and neutral atoms or molecules. Plasma can be found naturally in the universe in the form of stars, lightning, and auroras, but it can also be artificially created and controlled for
Introduction (What is plasma?)
1. Definition of plasmaPlasma is one of the four fundamental states of matter, along with solid, liquid, and gas. It is an ionized gas consisting of a collection of charged particles, including ions, electrons, and neutral atoms or molecules. Plasma can be found naturally in the universe in the form of stars, lightning, and auroras, but it can also be artif
high energy particles. Photo-lithography can be applied to only polymers with photo-sensitive, but soft lithography can be applied to various polymers, like unsensitized polymers, precursor polymers, conducting polymers, etc. But, naturally, soft lithography has some drawbacks such as deformation of the elastomeric stamp of mold, density of defects in the formed pattern, and difficulty in high-re