XPS의 장점
① 스펙트럼이 비교적 단순 → ∴ 스펙트럼선 방해가 적다.
② 비파괴 분석법
③ 거의 볼 수 없을 정도의 작은 반점에서 큰 물질까지의 시료를 분석 가능
④ 실험과정이 빠르고, 편리함
XPS의 단점
① 여러 분광법 만큼의 감도를 가지지 못함
→ 가장 적당한 조건에서, 수 ppm
Atoms/cm3
Atomic weight
An atom mass
Breakdown field
Binding energy(with Si)
Crystal structure
Density
Solid
Liquid at 1412℃
Dielectric constant, εr
Effective density of states of NC
Effective density of states of Nv
Effective mass, m*/m0
Electrons
Holes
Electron affinity, χ
Energy gap, Eg
Heat capacity
Solid
Liquid at 1,412℃
Index of refraction, n
Intrinsic carrier con
● Definition of plasma
Plasma is one of the four fundamental states of matter, along with solid, liquid, and gas. It is an ionized gas consisting of a collection of charged particles, including ions, electrons, and neutral atoms or molecules. Plasma can be found naturally in the universe in the form of stars, lightning, and auroras, but it can also be artificially created and controlled for
Introduction (What is plasma?)
1. Definition of plasma
Plasma is one of the four fundamental states of matter, along with solid, liquid, and gas. It is an ionized gas consisting of a collection of charged particles, including ions, electrons, and neutral atoms or molecules. Plasma can be found naturally in the universe in the form of stars, lightning, and auroras, but it can also be artif