pattern을 가지는 photomask를 위에 두고 빛에 expose 시켜주면 mask가 덮인 부분은 그대로 있으나 mask가 덮이지 않은 부분은 빛에 그대로 노출되어 해당 부위만 구조적 변형이 발생한다. Photoresist의 종류에는 photopolymeric, photodecomposing, photocrosslinking 등이 있으며, 그 중 photocrosslinking photoresist는 빛에 expose되었을
5.2 Drug Delivery System
5.2.1 Advantage of Nano-drug delivery system
By diagnosis, and for treatment, we need enhanced drug delivery system. Drug delivery system of these days is just eat and let it flow through the body. It is not good at efficiency. Because the digestive system sometimes digest and remove the drug before it reaches to the target.
For enhancing the efficiency of drug
~ 2000 Years Ago – Sulfide nanocrystals used by Greeks and Romans to dye hair
~ 1000 Years Ago (Middle Ages) – Gold nanoparticles of different sizes used to produce different colors in stained glass windows
1959 – “There is plenty of room at the bottom” by R. Feynman
1974 – “Nanotechnology” - Taniguchi uses the term nanotechnology for the first time
1981
(4) Double patterning
The double patterning is divided into four parts, leading with wafer requirements and then two sets of lithographic requirements (Generic Pitch Splitting - Double Patterning Requirements Driven by MPU metal Half-Pitch and Generic Spacer Patterning Requirements - Driven by Flash). The lithography requirements are different for each process; the requirements for pitch splitti
Tolerance limit and VIF in Collinearity statistics are indexes that judge multicollinearity of factor variables. Collinearity means relationship between two independent variables. For example, if coefficients correlation of two factor variables is 1, these variables have perfect Collinearity. And if coefficients correlation is 0, they have Collinearity not at all. Especially, relationship among 3