but we have nevertheless been polluting it for years.
The atmosphere can be divided vertically into four major layers : troposphere, stratosphere, mesosphere, and thermosphere.
Figure 2.1 The earth’s atmosphere is subdivided vertically into four major regions based on the air-temperature profile. The ozone layer that protects us from the sun’s UV radiation is in the stratosphere.
Layers>
- SiO2의 부도체 성질로 부터 집적회로내 금속층
사이의 효과적인 절연체로 사용가능
- 오염물질의 확산을 최소화
자연 산화물 – 오염물질이 대부분. (기억저장 공간이나 막 안정화용 사용)
게이트 산화물 – 트랜지스터의 게이트와 소스/드레인의 유전체로 사용
자계
The threshold voltage of a MOSFET is usually defined as the gate voltage where an inversion layer forms at the interface between the insulating layer (oxide) and the substrate (body) of the transistor. The purpose of the inversion layer's forming is to allow the flow of electrons through the gate-source junction. The voltage of oxide is given by
V_OX= 1/C_OX 2√(qN_A ε_Si V_0 )
SiO_2 V_O
Global Trend towards Protecting the Ozone Layer
Global Convention and Protocol
The Vienna Convention (for the Protection of the Ozone Layer)
The Vienna Convention is a treaty concerning the customary international law on treaties between states. It codifies some groundwork of international law trying to protect the ozone layer. The US was the one the biggest producers and consumers of
2O3)를 사용하여 substrate를 구성하고, 이 배면에 지지 및 보호용으로 Cu를 사용하여 Backside Metal layer을 형성, 이후 진행될 공정의 기반이 될 substrate층을 완성하려 한다.
Process Sketch Related Materials Related Hardware
(Chamber/Equipment) Note
Step1
Form Al2O3 Ingot
With CZ process ㅡ Al2O3 Czochralski Furnace Al2O3의 Polycrystal 을 사