(4) Double patterning
The double patterning is divided into four parts, leading with wafer requirements and then two sets of lithographic requirements (Generic Pitch Splitting - Double Patterning Requirements Driven by MPU metal Half-Pitch and Generic Spacer Patterning Requirements - Driven by Flash). The lithography requirements are different for each process; the requirements for pitch splitti
문제가 되는 반대쪽 전극의 손상이나 파티클 발생 등의 문제 해결 가능
1015 ions/cm2 이 300~ 700 eV 의 energy 로 표면과 충돌할 때 substrate 표면파괴 및 화학적인 오염이 심각함
residual film 형성
gas phase particle deposition
metallic impurities
불순물 제거 방법 : 습식 산화 제거에 의한 산소 또는 수소 plasma 처리
device industry in China was valued at $15 billion in 2009, accounting for more than 5% of global medical device industry and by 2016, due to the increase in patient pool and improving healthcare infrastructure, there will be an increase in health expenses and awareness and affordability up to $25 billion.
Currently, developed country has ratio of 1:1.9 for medical equipment industry against
device having low power consumption(half of LCD) and ultra-thin screen(1/3 of LCD, below 2mm thickness is possible)
3. Flexibility
It can be applicable to the curved shape part.
4. Eco-friendly
It is eco-friendly since it doesn't contain the toxic substances such as Hg.
5. Wide viewing angle
Viewing angle is the range of oblique angle which we can see the normal screen. Unlike LCD, the imag
1. Overview
1.1 Current situation of LGE Mobile division
LG was one of the powerful mobile phone manufactures in the world. According to research agency, Gartner, in 2005 LG was the third largest mobile phone manufactures world widely. and there market share was the third so that better than Motorola. Especially their innovative design embedded mobile devices such as PRADA phone and Secret