Like a finger in the macro world so feels a tiny tip on a lever in the nano world a surface Forces are in Pico Newton range the same like intermolecular binding forces
1-1. AFM tip
- actually feels the sample surface.
- silicon nitride
exhibit excellent flexibility, Contact AFM mode
- silicon crystal
high frequency oscillating(100kHz), more stiffer than silicon nitride, non co
폭 넓은 Physics들을 보다 정확하게 예측하는데 많은 도움이 된다.
2)Semiconductor
반도체 산업분야에서 Multi-Physics의 공정해석을 하기 위한 가장 쉽고 발전된 방법이 CFD이다. SemiconductorProcessing에서 CFD를 사용하는 공정은 Spin Coating, Lamp House Heating, CVD, MOCVD, MOVPE, PECVD, RTCVD, Etching, Electroplating 등이 있다.
process because it is air occlusion pump. It's also clean because of no use of oil
Application.
High vacuum pump is used for many parts like process of semiconductor, IC, nuclear fusion reactor and etcetera. Recently, high vacuum is especially used in aerospace industry and process of solar cell.[1]
Ultra High Vacuum
Definition.
Ultra high vacuum region is defined as the pressure lower
semiconductors. The world would be different without semiconductors and would surely be slower. And semi- conductors have also laid the foundation for worldwide networking through the Internet. The development process continues to move ahead.
2. Main products
Broadly speaking, the semiconductor industry is made up of four main product categories:
1.Memory: Memory chips serve as temporary st
PE CVD
PE CVD공정은 Plasma etching 이 사용되기 이전부터 반도체 금속배선의 보호막인 SiN과 SiO2를 저온에서 증착할 수 있는 새로운 생성원으로 소개
PE CVD기술은 SiO2와 SiN 박막 형성 뿐만 아니라 최근에는 천이금속이나 천이금속 실리사이드 형성에도 널리 사용
PE CVD의 박막 형성 mechanism
Plasma 에서 이