ofDiffusion
물질의 확산은 1855년 Adolf Fick에 의해 유도된 Fick’s Law 를 따르며 이는 다음과 같이 표현된다.
J= -D ∂C/∂x
∂C/∂x= Concentration gradient in the x-direction [M/s]
J=Diffusion flux across unit are at right angles to the x-direction [ mol/(s∙cm^2 )]
D=Diffusion constant [ cm^2/s]
여기서 – 부호는 흐름이 높은
Dialysis
What is dialysis?
Dialysis is a membrane process where solutes (MW~<100 Da) diffuse from one side of the membrane (feed side) to the other (dialysate or permeate side) according to their concentration gradient. First application in the 70’s.
General Principles
Separation between solutes is obtained as a result of differences in diffusion rates.
These are arising from differe
insoluble하게 바뀌고, 나머지 부분은 그대로 soluble하여 제거된다.
1.1.2 Molding
생성된 master 위에 polyurethane, silicone 같은 elastomer를 부은 후 열, UV 등으로 굳혀 master로부터 떼어내어 최종적으로 일종의 stamp 기능을 하는 mold를 만드는 과정이다.
Fig.1. Overall process of master making and molding using photoresist SU-8
of Mild Oxidationof Graphite
What happens to Graphite?
Nanochannels or micropores are made.
Effects of Mild Oxidation.
Micropores acts as ‘reservoirs’ for lithium ions storage.
Prevent the graphite anode from expanding by lithium ion intercalation
Si has theoretical capacity of 4200mAh/g
Due to it’s large volume change, pulverization can be occurred.
Silicon h
of EUV resist can be explained below the figure. 4. we can summary the requirements of EUV resist with four points.
First, Resist sensitivity have to target 10mJ/cm2 to keep the required source power in a realistic target range of some 100W @ 100wph tput.
Seconds, to enable pattern transfer of features down to 11nm, the resist blur(diffusion length) has to be reduces to at least 5nm.
Third,