제목: 오존수와 고체산(sol-gel법)을 이용한 웨이퍼 세정
문제제기: .기존 RCA법의 요염물 다량 배출(H202, DI water 및 HCl)
기존 RCA법에서 고가 운영비(과산화수소 처리공정, 높은 온도유지)
.반도체가 점점 작아지면서 미세한 오염물 제거의 필요성
지표면 오존의 심각성(오존주의보)
GMO(Genetically Modified Organism)라는 말의 정의가 국제적으로 통일된 것은 없으나, 어느 수준에서 GMO를 보느냐에 따라 다양한 정의를 내린다. 그것에 쓰이는 기술에 따라, 유전자 공학(gene engineered), 유전자 조작(gene manipulated), 유전자 이전(transgenic)등의 다양한 의미로 통용되고 있다. 우리나라 식품의약품안전
● Definition of plasma
Plasma is one of the four fundamental states of matter, along with solid, liquid, and gas. It is an ionized gas consisting of a collection of charged particles, including ions, electrons, and neutral atoms or molecules. Plasma can be found naturally in the universe in the form of stars, lightning, and auroras, but it can also be artificially created and controlled for
Introduction (What is plasma?)
1. Definition of plasma
Plasma is one of the four fundamental states of matter, along with solid, liquid, and gas. It is an ionized gas consisting of a collection of charged particles, including ions, electrons, and neutral atoms or molecules. Plasma can be found naturally in the universe in the form of stars, lightning, and auroras, but it can also be artif
task currently important.
Regulation of nanoparticles.
Size : 10~100nm (EPR effect)
Coating PEG polymer
Why nanoparticles?
1) It can deliver a larger quantity of drugs with better safety.
2) Easy to attach targeting ligands.
3) It is enough size to deliver multi-drugs.
4) Can regulate releasing of drug particles.
5) Can avoid multidrug resistance through cell-surface protein pump.