An ion beam is a type of An ion beam is a type of particle beam consisting of ions.
Ion beams have many uses in electronics manufacturing (principally ion implantation) and other industries.
아르곤 이온은 위의 과정으로 생성 됩니다.
전자기 코일 또는 영구 자석으로부터 얻은 자기장은 종종 전자의 소용돌이를 만들기 위해 양극과 음극 사
Respect for Art ( Faulty )
Summary: the teacher saw a caricature of his face on the blackboard. It was sharp, accurate, and funny. The class waited for his reaction. The teacher observed it with interest and then said: "It is too well done to be erased. Let the artist first copy it on paper. My compliments to the talented caricaturist."
Segment's reason: Our team think this story is "F", be
Tungsten filament was
heated to generate electron.
Revolving 270, the electrons
are directed by
electromagnetic field
resulting collision onto the
source surface
After heated to certain
degree, source gas was
generated
The sensor monitors the
thickness of deposited film.
High vacuum should be kept in
the chamber not to contain
oxigen
gas which damages
substrat
process
Fast deposition speed
Cheap process device
1. Partially different thickness
2. Difficult to control the element ratio
3. Hard to deposition the complex material layer
4. Low film quality
3.Material to be evaporated by e-beam
- E-beam dashes against
material
- E-beam transport energy
to the material
- Then evaporation process
is start