effect
해결
SiO2에 비해 큰 유전상수
물리적 두께 증가
전자의 터널링 억제
Motivation
High Density
- More transistors onto a smaller chip
- Cost effective from more chips on the same wafer
High Performance
- Higher current drive
- Smaller capacitance
- Reduced gate delay
Low Voltage & Low Power
- Mobile system application
higher dielectric constant than silicon dioxide.
In such a scenario, a thicker gate layer might be used which can reduce the leakage current flowing through the structure as well as improving the gate dielectric reliability.
The drive current ID for a MOSFET can be written
(using the gradual channel approximation) as
Where
W : width of the transistor channel
L : chan
● Definition of plasma
Plasma is one of the four fundamental states of matter, along with solid, liquid, and gas. It is an ionized gas consisting of a collection of charged particles, including ions, electrons, and neutral atoms or molecules. Plasma can be found naturally in the universe in the form of stars, lightning, and auroras, but it can also be artificially created and controlled for
Introduction (What is plasma?)
1. Definition of plasma
Plasma is one of the four fundamental states of matter, along with solid, liquid, and gas. It is an ionized gas consisting of a collection of charged particles, including ions, electrons, and neutral atoms or molecules. Plasma can be found naturally in the universe in the form of stars, lightning, and auroras, but it can also be artif
artificial.
hazard
→ Dangerous or threatening situation. Situation of potential threats. The current nature
danger
→ Possible to predict exposure but already faced losses. many used in the sense natural.
uncertainty
→ Attributes a series of incidents that take place via a variable that can not be predicted with. The intensity of the higher risk of uncertainty is also high.