Figure 13 shows that cryo pump is cooling pump. It means this pump is cooling, liquefaction and store air, not pumping. Generally, it has 3 processes like condensation, absorption and trap at low temperature. The cooled air or molecules do not have any momentum so it is no possibility to heat any molecules. It means vacuum.
Cryo pump have High emission velocity and high emission capacity so it
Water-soluble material-shaving aid material
Molecular weights 에 따라Liquid 또는 low-melting solid 상태로 존재
Physical Properties
Tg= -67oC
Low toxicity
Non-Toxic
의약품, 스킨로션 등
기계적 성질이 안 좋아서 다른 고분자나 이온성 물질과 blend 또는 합성하여 사용
Glass Transition Phenomena
액체를 냉각할 때 물질 고유의 온도
materials to be used in processing for CMOS devices
Process compatibility - for one, the film must survive sufficiently hightemperatures such as a Rapid thermal anneal to 1000 °C for say, 10 s (as dictated by the CMOS technological process)
Reliability
Stability against degradation by the electric field and injected carriers.
Precursor availability
Precursor and process costs