To understand operation system of SEM
To acknowledge of D.O.F and Resolution
To find what becomes differ by Aperture Size
Aperture
D.O.F / Resolution
Convergence angle
Probe current
Probe diameter
Change Aperture
Change Magnification
How to change D.O.F
How to change resolution
An aperture is a hole or an entrance which is passing light.
Controlling aperture
resolution registration. So, to solve these problems, we could find the following article. "Hybrid NanoImprint-Soft Lithography with Sub-15nm Resolution by Zhiwei Li, Yanni Gu, Lei Wang, Haixiong Ge, Wei Wu, Qiangfei Xia, Changsheng Yuan, Yanfeng Chen, Bo Cui, and R. Stanley Williams. NANO LETTERS 2009 Vol.9, No.6 2306~2310"
Article : To achieve high resolution patterning
Soft lithography co
upon S&L banks due to lobbying. However, the problem became too sever to conceal and Paul Volcker decided to deal with this matter with high interest rate. While the policy worked in containing inflation, depression in market &and economy occurred. In the end, wide spread of insolvency was inevitable.
Resolution of the Crisis
US government had to spend public fund to deal with the Crisis.
Resolution) 결정 인자
┌ 컬럼효능도(Column efficiency)
└ 액상효능도(Liquid phase efficiency)
1) Column Efficiency (컬럼효능도)
• 원래 조밀했던 띠가 Column을 통과하면서 Peak 사이의
폭이 넓어지는 정도.(화합물의 개수 확인 가능)
• peak는 가능한 한 sharp하게 나오는 것이 좋다.
•