(Gate Metal : Bottom Moti + Cu, Pure Al + Top Moti, AlNd etc…)
LGD의 경우 응답속도 상향을 위해 비저항이 낮은 Cu를 Main Metal로 전환
? Cu : 하부에 Bottom Moti를 300Å 정도 先증착하는 이유는 GLS와의 Adhesion을 높이기 위해서임
(GLS와 Cu와의 접촉 時 Adhesion 약화로 Cu Metal이 GLS에서 떨어져 나가는 경우 발생)
sealant. Oxygen is also commonly present in polymer backbones, such as those of polyethylene glycol, polysaccharides (in glycosidic bonds), and DNA (in phosphodiester bonds).
Polymer properties are broadly divided into several classes based on the scale at which the property is defined as well as upon its physical basis. The most basic property of a polymer is the identity of its constituent mon
Ⅰ. Introduction
1. Study background and objectives
Recently, due to environmental pollution and climate change, attention to environment is more growing than ever. Especially, buildings form 40% of energy and resource consumption, 30-40% of carbon dioxide emission, 20-25% of waste discharge, 17% of water consumption, and 25% of wood consumption, so buildings are mainly responsible for