II. How is CBM formed
Coalbed methane (CH4) forms in one of two ways. During the earliest stage of coalification (the process that turns plant detritus into coal), biogenic methane is generated as a by-product of bacterial respiration. Aerobic bacteria (those that use oxygen in respiration) first metabolize any free oxygen left in the plant remains and the surrounding sediments. In fresh water
surface, improved solubility, targeted drug delivery and multifunctionality, nanoparticles have emerged as potential drug delivery carriers to tissues throughout the body. Yet passing the BBB is particularly difficult. The proper design of such engineered ‘nanocarriers’ becomes very important in transversing the impermeable membranes to facilitate drug delivery. At the same time, it is also r
Environmental factors
organic matter (source of carbon and energy)
oxygen availability
nutrient (N,S, P) availability
temperature
pH
Eh
salinity
water activity
The addition of nutrients and electron acceptors
Stimulate activities that promote degradation of pollutant by the indigenous or existing microbial populations in the contaminated area
The addition of specific metabolic ca
(Up) Schematic diagram of apparatus used for RIE in semiconductor processing.
(Right) RIE system from Eidgenossische Technishe Hochschule Suiss Federal Institute of Technology
(http://www.ifm.ethz.ch/mems/eq_rie.htm
Wafer가 놓이는 전극에
RF전압을 인가하고, 공정압력을
낮게 유지하여 Plasma 중의 양이온이
Plasma sheath를 통해 가속되게
함으로써
4. Equipment
4.1 RCA cleaning
RCA cleaning is a series of rinsing procedure prior to experiment with Si wafer. The purpose of the RCA clean is to remove organic contaminants (such as dust particles, grease or silica gel) from the wafer surface. There are three steps to be performed. The first step is to remove organic contaminant from surface of wafer. Second step is to remove any oxide layer