Introduction (What is plasma?)
1. Definition of plasma
Plasma is one of the four fundamental states of matter, along with solid, liquid, and gas. It is an ionized gas consisting of a collection of charged particles, including ions, electrons, and neutral atoms or molecules. Plasma can be found naturally in the universe in the form of stars, lightning, and auroras, but it can also be artif
원추형 tip(spindt type cathode)
-금속 tip
-실리콘 tip
테두리형 emitter
잎사귀형(leaf type)
빗형(comb type)
별형(star type)
저항층(resistive layer)을 갖는 tip형 emitter
평면형 emitter-MIM구조
-CNT(탄소나노튜브)
형광이란, 물질의 내부에 있는 전자가 외부로부터 에너지
4. Equipment
4.1 RCA cleaning
RCA cleaning is a series of rinsing procedure prior to experiment with Si wafer. The purpose of the RCA clean is to remove organic contaminants (such as dust particles, grease or silica gel) from the wafer surface. There are three steps to be performed. The first step is to remove organic contaminant from surface of wafer. Second step is to remove any oxide layer
Figure 13 shows that cryo pump is cooling pump. It means this pump is cooling, liquefaction and store air, not pumping. Generally, it has 3 processes like condensation, absorption and trap at low temperature. The cooled air or molecules do not have any momentum so it is no possibility to heat any molecules. It means vacuum.
Cryo pump have High emission velocity and high emission capacity so it
The crystal structure is a member of the hexagonal crystal system and consists of tetrahedrally coordinated Zinc and Sulfur atoms that are stacked in an ABABAB pattern.
The structure is closely related to the structure of lonsdaleite, or hexagonal diamond.
As there all orientations of the crystal, rings of different 2θ values are formed
A single crystal specimen in a Bragg-Brentano diffrac