소개글
[공학]박막 재료의 물성 측정(영문)에 대한 자료입니다.
목차
1.INTRODUCTION
2.Basis of the thermodynamical model
3.Energy of metal-substrate oxide-film interfaces
4.Thermodynamics of amorphous and crystalline aluminum-oxidefilms on aluminum substrate
5.Stability & Application
6.Conclusion
본문내용
BulkGibbs free energy of formation of the amorphous oxide islarger than that of the corresponding crystalline oxide.
Thin filmThe thin amorphous metal-oxide film on its metal substrate can be stable modification with respect to the corresponding crystalline metal-oxide film the same substrate.
1. Interaction contribution to the - interfacial energy
Following the treatment given in Sec. III A1 for the interaction energy across the crystalline-amorphous- interface
1. the difference in ⅰ)bulk ⅱ)surface ⅲ)interfacial
energy of {Al2O3}-/-
2. The stability of the oxide films as a function of growth temperature, oxide film thickness, crystallographic orientation of