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분야
pptxⅡ. Si wafer
Ⅲ. Producing process
Ⅳ. Applications
-Dopant(B,P,Sb)
Symmetrical property
-epitaxy
->mechanical
->diffusion&etching
Damage down
Vibration control
Highly Flatness
static electricity
Clean room
www.semipark.co.kr
Collection of the Defects on Silicon Wafer-LG Siltron Inc.
Full-FieId Submicron Visual Wafer Inspection
Spiking and Epitaxial Si in Contact Holes
