소개글
[박막공학개론] thin film evaporation process(영문)에 대한 자료입니다.
목차
What is the Thin Film Process?1-1. Definition1-2. Process1-3. Classification
Evaporation
E-beam evaporation
Thermal evaporation
Comparison & Problem
Conclusion
본문내용
1. Cleaning
- For elimination particle
2. Deposition
- Formation some material layer on the substrate
3. Photolithography
- Formation some pattern
4. Etching
- Elimination substrate or PR layer
Material to be evaporated is heated to
increase vapor pressure
In a reasonably high vacuum, material
atoms fly to a target and stick onto the
surface
Source material is coated onto the target
surface
ADVANTAGE
Simple process
Fast deposition speed
Cheap process device
1. Partially different thickness
2. Difficult to control the element ratio
3. Hard to deposition the complex material layer
4. Low film quality
3.Material to be evaporated by e-beam
- E-beam dashes against
material
- E-beam transport energy
to the material
- Then evaporation process
is start