Grit chamber
Definition
Remove the grit and inorganic matter over 0.2mm in waste water
[ Function ]
Prevent abrasiona and damage of machine equipment
Prevent Piping system blockage
Prevent adverse effect by deposits
Gravity type chamber
Using the gravity and velocity of waste water
Take the deposits to sludge facility, using sand pump
Aeration type chamber
Using centri
To prevent silicon from agglomerating
→ should cool the solid quickly
Rapid cooling
→ large thermal gradient in crystal
Postulate K=20W/m K
Diameter of wafer: 10-20 cm
L (latent heat of fusion) = 340 cal/g
Temperature gradient in silicon CZ (dT/dx) : 100°C/cm
Solid Source
each cell is loaded with a charge material, usually a pure element like gallium or arsenic, which is solid at room temperature.
The gaseous atomic or molecular beam is generated by heating the charge in the effusion cell in the growth chamber.
The effective beam pressure or flow rate of the gas, called the beam flux, is varied by adjusting the effusion cell temperature.
A
systems이나 특별한 용액에 의해 제거된다.
Organic contaminants - smog, skin oil, fluxes, lubricants, solvent vapors, monomers from plastic tubing and storage boxes that can condense on substrate. strong oxidizers, gaseous or liquid을 이용하여 제거된다.
Impurities- incorporated during the formation of substrates or over layer films. 보통 제거되지 않는다.