ToolsTheMBE growth can be monitored in real-time using a Reflective High Energy Electron Diffraction (RHEED) system. The system includes an electron gun which directs an electron beamtowards the substrate at a shallow angle (1-2°), and a phosphor screen which detects the diffracted beam.
As the substrate surface varies (from rough to smooth) so does the pattern detected at the screen.
to a target and stick ontothe
surface
Source material is coated ontothe target
surface
ADVANTAGE
Simple process
Fast deposition speed
Cheap process device
1. Partially different thickness
2. Difficult to control the element ratio
3. Hard to deposition the complex material layer
4. Low film quality
3.Material tobe evaporated by e-beam
- E-beam dashes against
is air occlusion pump. It's also clean because of no use of oil
Application.
High vacuum pump is used for many parts like process of semiconductor, IC, nuclear fusion reactor and etcetera. Recently, high vacuum is especially used in aerospace industry and process of solar cell.[1]
Ultra High Vacuum
Definition.
Ultra high vacuum region is defined as the pressure lower than 10 tothe min
oftools on a frame which is moved over the ground to break the soil process termed "chisel plowing". Graham Plow, Inc.'s predecessor manufactured and sold chisel plows whereinthe upper forward portion ofthe shank was rigidly fixed tothe plow beam by a rigid clamp. These rigid structures proved tobe unsatisfactory. It was due totheir inability to withstand shocks when used for plowing in roc