[3] Thin Film Deposition
초집적 반도체를 구성하는 소자들은 그 특성상 그 크기가 매우 얇아(작고) 미세한 조직을 가진다. 그리고 이것은 박막 증착(TFD = Thin Film Deposition) 공정을 통해 제작된다. 박막 증착이란 이름 그대로 표면에 얇은 막을 씌우는 기술을 뜻하는데 이 공정을 통해 기판(substrate)이나 이전에
요 약
In present study, the effect of shapes of an air cooling module on the heat transfer performance for electronic packaging applications was numerically investigated. The types of three different fins considered in this study were pin-fin, plate-fin and ㄷ fin which have the different surface areas.
To improve cooling performance of the heat sinks for the LCD TV by adequate natural conve
rectangular ribs)
no appreciable increase
in heat transfer rates
Present authors have proposed a unique type of promoter : "V-shaped" is the best.
And they experiment to find adequate "height and angle"
2-2. Experimental Apparatus and Measurements
*Apparatus
- heat transfer plate and side plate
- V-shaped promoter(1mm thick vinylchloride resin plate)
- fluid : water
The whole appar
3. 냉각판의 설계와 해석 결과
Consider a cold plate fabricated from aluminum(k=190W/mK) with regularly spaced rectangular channels through which the water is passed.
Assume the top surface of the cold plate to be insulated. System reliability considerations dictate that the maximum cold plate temperature must not exceed 40℃.
(a) Determine h and calculate the pumping power.
rectangular ribs)
no appreciable increase
in heat transfer rates
Present authors have proposed a unique type of promoter : "V-shaped" is the best.
And they experiment to find adequate "height and angle"
2-2. Experimental Apparatus and Measurements
*Apparatus
- heat transfer plate and side plate
- V-shaped promoter(1mm thick vinylchloride resin plate)
- fluid : water
The whole appar