2.3 C-V graph
The measured MOS capacitance (called gate capacitance) varies with the applied gate voltage.
① Measurement of C-V characteristics
-Apply any DC bias, and superimpose a small (15 mV) ac signal
-Generally measured at 1 MHz (high frequency) or at variable frequencies between 1KHz to 1 MHz
-The dc bias VG is slowly varied to get quasi-continuous C-V characteristics
② C-V chara
4. Equipment
4.1 RCA cleaning
RCA cleaning is a series of rinsing procedure prior to experiment with Si wafer. The purpose of the RCA clean is to remove organic contaminants (such as dust particles, grease or silica gel) from the wafer surface. There are three steps to be performed. The first step is to remove organic contaminant from surface of wafer. Second step is to remove any oxide layer
Method
1.인슐린 펌프의 기계적 설계, 소재탐구 및 성능 시험
본 연구에서는 생체 적합한 실리콘, 유리, PDMS(polydimethylsiloxane)를 이용하였고, 마이크로머시닝 가공기술을 이용하여 그 크기를 초소형화 하였다. 약물 전달 장치는 전달되는 약물의 양에 따라 인체에 심각한 영향을 줄 수 있으므로 전달 정확