± 5-10%
• Need hard mask (SiO2 or Si3N4)
• Thermodynamically controlled
• Dopants electrically active
Very expensive equipment
• Multiple processes per tool
– mass separation
• Uniformity ± 1%
• Room temperature to 200 °C
– can use photoresist mask
• Need anneal step
– heal crystal damage
– activate dopants
the growth process ofthe Sn and Ge doped ZnO films. High-purity N2 gas was fed at about 100 sccm intothe tube furnace at one end, while the other end was connected to a rotary pump. The growth process was allowed to proceed for 1 h. A vacuum of 6 Torr was maintained inside the tube furnace during the depositionofthe films. Thecrystal structure and morphology ofthe products were investigated
:
Maximum 200°C/min
*Separate Electric furnace and other system like Electronic scale
-Because Electric furnace temperature is very high
so we need to protect other system.
instrument composition
-Electric furnace
Temperature range:
25°C~1500°C
Heat speed :
Maximum 200°C/min
*Nitrogen or Argon in Electric furnace
-Because the inhibitionof oxidizationof sample
What is Amorphous metal?
Polycrystalline grains of varying shapes andsizes
Misaligned planes of atoms slip past each other easily, absorbing energy and allowing dislocations to move, making deformation permanent.
Grain boundaries represent weak spots
Also called Metallic glasses or glassy metals
Cooled faster than atoms can rearrange into a crystal.
Dislocation movement obstructed s
and trap at low temperature. The cooled air or molecules do not have any momentum so it is no possibility to heat any molecules. It means vacuum.
Cryo pump have High emission velocity and high emission capacity so it is possible for long time at 10-2 [Pa].
This pump is necessary for recycling process because it is air occlusion pump. It's also clean because of no use of oil
Application.
Hi