3. Experiment Method
A measurement method of sample of powder form is an x-ray diffractometor(Fig. 9).
Fig. 9. An x-ray diffractometer.
3.1. Making of Sample Powder
A Sample is made a powder form. A diameter of powder has good reproducibility as smaller. But generally 10~35μm is a suitable size of sample. We must caution a deterioration by air, gas, humidity and pouri
substrate : Ionic bonding (strong, long-range)
tail to tail : Vans der waals bonding (weak, short-range)
Selection of substrates and head molecule is important
clean substrates (without defects) will help to create good SAM products.
4. Patterning is also possible via various methods.
The origin of the S-Au(111) bond and the binding site preference are discussed from
preferred C axis orientation of (002) which has a full width at half maximum (FWHM) of 0.3°. The XRD pattern of sample (b) also shows the high C axis oriented ZnO grains with FWHM of 0.5°, which suggests that the crystallization of ZnO turns worse. Meanwhile, other three additional peaks attributed to Zn2GeO4 are observed in sample (b). Fig. 1 (c) shows that the crystallization of ZnO tends to
2. Experimental
2.1. Film preparation
Pure ZnO thin films were prepared on the glass substrate using RF magnetron sputtering system. And Mg, Ga doped (3 wt%) ZnO thin films were prepared on the ZnO pre-sputtered glass substrate using RF magnetron sputtering system. The PureZnO target was made from high purity ZnO powder (99.99 %) . The MZO/GZO targets were made from high purity ZnO powder (
1. Cleaning
- For elimination particle
2. Deposition
- Formation some material layer on the substrate
3. Photolithography
- Formation some pattern
4. Etching
- Elimination substrate or PR layer
Material to be evaporated is heated to
increase vapor pressure
In a reasonably high vacuum, material
atoms fly to a target and stick onto the
surface
Source materi