① 컨트롤러
여기서 의미하는 컨트롤러는 하드디스크에 있는 것으로,메인보드의 IDE컨트롤러와는 다른 것이다. 컨트롤러에 의해 스테핑 모터와 헤드를 제어하고, IDE와 통신한다. 컨트롤러는 일반적으로 하드디스크의 뒷면에 붙어 있음. 컨트롤러에는 하드디스크를 마스터로 사용할 것인지 슬레이브
process
Fast deposition speed
Cheap process device
1. Partially different thickness
2. Difficult to control the element ratio
3. Hard to deposition the complex material layer
4. Low film quality
3.Material to be evaporated by e-beam
- E-beam dashes against
material
- E-beam transport energy
to the material
- Then evaporation process
is start
2. Experimental
2.1. Film preparation
Pure ZnO thinfilms were prepared on the glass substrate using RF magnetron sputtering system. And Mg, Ga doped (3 wt%) ZnO thinfilms were prepared on the ZnO pre-sputtered glass substrate using RF magnetron sputtering system. The PureZnO target was made from high purity ZnO powder (99.99 %) . The MZO/GZO targets were made from high purity ZnO powder (
The GZO, MZO thinfilms were prepared on ZnO pre-sputtered glass substrate using RF Sputtering Technique. Morphological, Structural and Electrical properties of deposited films were investigated in comparison with pure ZnO Thinfilm by scanning electronic microscopy (SEM), Atomic force microscopy (AFM), X-ray diffraction (XRD), PL spectra and other electrical analytic method. SEM images showed al