분야
pptxSteps to Obtaining Semiconductor Grade Silicon (SGS)
1 Produce metallurgical grade silicon (MGS) by heating silica with carbon
SiC (s) + SiO2 (s) Si (l) + SiO(g) + CO (g)
2 Purify MG silicon through a chemical reaction to produce a silicon-bearing gas of trichlorosilane (SiHCl3)
Si (s) + 3HCl (g) SiHCl3 (g) + H2 (g) + heat
3 SiHCl3 and hydrogen react in a process called Siemens to obtain pure semiconductor- grade silicon (SGS)
2SiHCl3 (g) + 2H2 (g) 2Si (s) + 6HCl (g)
